The invention provides a heat treatment method of
quartz glass. The heat treatment method adopts a
vitrification molding and heat treatment integrated process, and comprises: (1) vitrifying a silicondioxide
raw material to obtain a transparent
quartz glass; (2) directly cooling the vitrified high-temperature transparent
quartz glass to a heat treatment temperature, and carrying out
thermal insulation; and (3) cooling the obtained quartz glass to a
room temperature at a certain annealing rate to obtain the transparent quartz glass with
low stress birefringence. According to the method of the invention,
vitrification forming and heat treatment are carried out in the same
sintering furnace, the temperature after
vitrification forming is directly reduced to the heat treatment temperature, andthermal insulation is carried out, so that the heat treatment
thermal insulation time is effectively shortened, the
pollution risk is reduced, the production efficiency is improved, and the stress
birefringence of the prepared quartz glass is smaller than 1.8 nm / cm.