The invention provides a micro
broadband fiber micro
pressure sensing device. The micro
broadband fiber micro
pressure sensing device is characterized in that a long cavity
fiber micro F-P cavity is utilized to implement external micro
pressure sensing; the effect of the external micro pressure changes the length of the micro F-P cavity so that the spectrum characteristic of an interference
signal of the micro F-P cavity is changed; and the magnitude of the micro pressure can be accurately measured through
data analysis of the interference spectrum characteristic for micro F-P cavity reflection. For the micro
broadband fiber micro pressure sensing device, the
grinding technology is used to control the thickness and quality of a
pressure sensitive terminal of the micro F-P cavity, so that the
pressure response frequency can be improved and micro
pressure measurement of broadband can be realized; and furthermore, a temperature compensating fiber
grating can be manufactured on a reflectance spectrum
signal output fiber, and with combination of
signal processing, the
cross sensitivity between
temperature and pressure can be eliminated and highly accurate measurement of the micro pressure can be realized. The micro broadband fiber micro pressure sensing device has the advantages of micromation of the pressure sensing head,
pressure response broadband, high sensitivity, anti-
electromagnetic interference, no temperature
crosstalk, and the like.