Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods

[0025]Reference will now be made in detail to the embodiments, examples of which are illustrated in the accompanying drawings, in which some, but not all embodiments are shown. Indeed, the concepts may be embodied in many different forms and should not be construed as limiting herein. Whenever possible, like reference numbers will be used to refer to like components or parts.

[0026]Embodiments disclosed herein include alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods. A process chamber includes chamber walls defining a process volume in which a substrate may be placed and the walls support a lid assembly of the process chamber. The lid assembly contains at least one of an energy source and a process gas dispenser. Moreover, an alignment system may include at least one each of a bracket, an interface member, and an actuator. By attaching the bracket to the chamber wall and securing the i...