The invention relates to the technical field of GaN
single crystal preparation, and discloses a GaN
single crystal manufacturing device which comprises a
quartz reaction
pipe, a connecting
flange and a separating
flange. A high-temperature electric furnace matched with the
quartz reaction
pipe is annularly arranged on the outer side of the
quartz reaction
pipe. A quartz guide inlet pipe, a quartz guide gas pipe, a quartz inner container, a quartz outer container, a quartz Ga groove, a quartz spiral reaction pipe, a quartz
flange connecting pipe, a quartz stepped outer frame, an inner spray pipe and a middle spray pipe are arranged in the quartz reaction pipe; and a flange plate of the quartz inner container is clamped between two flange plates of the connecting flange. According to the manufacturing device of the GaN
single crystal, an HVPE method and an MOCVD method are used in the same device to control the growth of the GaN single
crystal, so that the situation that a
gallium nitride crystal is cracked when the
gallium nitride crystal grows thick or is cooled due to stress caused by a
lattice constant and a
thermal expansion number can be effectively avoided, and the grown
gallium nitride is easy to strip from
sapphire when being cooled. The manufacturing and production cost of the product is effectively reduced.